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2 cards from this section. Quick, good the night before a test.
What does photolithography do?
Think light and pattern creation.
What type of etching uses liquid chemicals?
Focus on the medium used in this process.
What is the purpose of photolithography in MEMS?
Remember the primary functionality of photolithography.
True or False: Doping increases silicon's electrical resistance.
Think about how doping modifies silicon's electrical properties.
Design a microfabrication process for a new MEMS actuator, incorporating at least three different techniques discussed in class.
Think about how each process contributes to achieving a functional device.
Evaluate the impact of material choice in the microfabrication of MEMS devices on their performance characteristics.
Consider the properties of materials used in the fabrication process.
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