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4 cards from this section. Quick, good the night before a test.
What are the two primary types of silicon used in MEMS?
Look for the types mentioned regarding their structures.
Name a common polymer used in MEMS.
Think about the flexible materials often mentioned.
What type of silicon is characterized by a single crystal structure?
Think about the structural arrangement of the crystals.
True or False: Silicon dioxide can be used as an insulating layer in MEMS.
Consider the role of insulators in electronic devices.
Given a MEMS device that requires high sensitivity in a biological environment, discuss the selection of materials and justify your choices.
Think about the requirements the device must meet and the environment it will be used in.
Evaluate the trade-offs between using metals and polymers in MEMS with respect to reliability and performance.
Consider both mechanical properties and the environments the devices will operate.
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