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3 cards from this section. Quick, good the night before a test.
What is photolithography used for?
Think about patterns and how they are applied.
Name one type of etching.
Recall the difference between liquid and gas methods.
What does photolithography rely on?
Focus on the materials involved in creating patterns.
True or False: Dry etching is primarily done with liquid chemicals.
Consider the phase difference in etching methods.
Design a MEMS device using photolithography, etching, and deposition techniques. Outline the steps you would take.
Think about the sequential process and how each step interacts.
Discuss how the integration of doping and bonding affects the overall performance of a MEMS device.
Consider how materials and their properties work together.
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