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4 cards from this section. Quick, good the night before a test.
What does sensing in MEMS refer to?
Think about how devices perceive their surroundings.
Name a common type of MEMS sensor.
These sensors help with measuring motion.
What does a MEMS sensor do?
Focus on what sensing involves.
True or False: Electrostatic actuation consumes a lot of power.
Consider the advantages of electrostatic mechanisms.
Design a MEMS device that uses an accelerometer to control a microvalve in a fluid delivery system. What considerations would you take into account?
Think about the interaction between sensing and actuation.
Analyze the advantages and challenges of integrating MEMS sensors and actuators in a single device.
Consider both sides of the integration’s impact on performance.
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