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3 cards from this section. Quick, good the night before a test.
What does FEM stand for?
Think about breaking things into smaller parts.
Name a physical behavior that FEM can simulate in MEMS.
Consider what MEMS devices experience.
What is the main advantage of FEM in MEMS?
Consider the effectiveness of simulations.
FEM stands for Finite Element Method.
Break down the acronym.
A MEMS pressure sensor's diaphragm is designed using FEM to predict its deflection under varying pressures. Describe how you would set up the FEM analysis step by step.
Consider the workflow in the FEM process.
Discuss how computational resources might limit the scope of FEM analysis in a MEMS design scenario.
Think about how size affects computation and accuracy.
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