Practice Mems Fabrication Techniques Overview (4.4) - MEMS Design and Fabrication Techniques

Practice: MEMS Fabrication Techniques Overview

Lesson 4.4MEMS Design and Fabrication Techniques

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9 questions

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6 sample questions

Question 1.
What fabrication technique involves the removal of material from a substrate?
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Think about which method creates structures by taking away material.
Question 2.
Name one application for surface micromachining.
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What devices use layers built on the surface?
3Question 3.
What is bulk micromachining primarily used for?
- Joining wafers
- Material removal
- Film deposition
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Consider the main action involved in this technique.
4Question 4.
True or False: Surface micromachining builds structures by removing material.
- True
- False
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Think about whether it adds or takes away from the substrate.
Question 5.
Design a MEMS device that utilizes both bulk micromachining and surface micromachining. Describe the processes involved and why both techniques are necessary.
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Think about which components require removal versus which need to be built up.
Question 6.
Compare and contrast DRIE and LIGA in terms of their applications in MEMS. How would one be preferable over the other?
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Consider the nature of the structures you're creating.

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