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4 cards from this section. Quick, good the night before a test.
What is the main consideration when selecting materials for MEMS?
Think about how materials perform differently at smaller dimensions.
Give one example of a fabrication method used in MEMS.
Recall the methods mentioned in the chapter.
What is a key constraint in MEMS design related to materials?
Think about how properties change when scaling down.
True or False: Fabrication process compatibility does not affect MEMS design.
Consider the implications of mismatch.
Design a microscale temperature sensor informed by the constraints of material properties, fabrication processes, and electrical effects. Justify your choices.
Consider common temperature sensing techniques and how constraints influence design.
Analyze how a MEMS accelerometer might fail if thermal expansion is not accounted for in its design and suggest a mitigation strategy.
Think about real-life applications of accelerometers.
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