Practice Silicon Nitride (si₃n₄) (8.2.3) - Materials and Processes in MEMS Fabrication

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6 sample questions

Question 1.
List two uses of silicon nitride in MEMS applications.
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Think about where protective layers are needed.
Question 2.
What does high tensile strength mean?
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Consider stress and breaking points in materials.
3Question 3.
What is silicon nitride primarily used for in MEMS?
- As a thermal conductor
- As a diffusion barrier
- As a heat sink
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Think about protective functions in devices.
4Question 4.
True or False: Silicon nitride is highly sensitive to chemical corrosion.
- True
- False
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Recall the properties of silicon nitride.
Question 5.
How would you design a MEMS device in an environment prone to chemical exposure? Discuss the material choices and the role of silicon nitride.
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Consider how different materials interact with chemicals.
Question 6.
Evaluate the significance of using silicon nitride as a structural film in MEMS devices. What potential drawbacks might you consider?
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Think about the trade-offs in using strong materials.

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