Practice Polymers (su-8, Pdms, Parylene) (8.2.5) - Materials and Processes in MEMS Fabrication

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6 sample questions

Question 1.
What is PDMS known for in MEMS fabrication?
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Think about medical applications.
Question 2.
Name one application of SU-8.
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Consider what it is commonly used for in manufacturing.
3Question 3.
What is a primary use of PDMS in MEMS applications?
- Structural components
- Microfluidic channels
- Electrical interconnects
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Think about its physical properties.
4Question 4.
Parylene is known for its:
- True
- False
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Consider what happens when Parylene is layered over devices.
Question 5.
Design a microfluidic device using PDMS. Discuss the steps you would take and the properties of PDMS that justify its use.
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Think about PDMS's physical characteristics when choosing materials.
Question 6.
Critically analyze the impact of SU-8's properties on the fabrication of a MEMS accelerometer. What challenges might one face?
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Consider how material properties influence processing techniques.

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