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3 cards from this section. Quick, good the night before a test.
What is photolithography used for?
Think about how we prepare materials in electronics.
What is a photomask?
Consider what we align during exposure.
What is the primary purpose of photolithography?
Remember, what is the object's purpose in fabricating MEMS?
True or False: Positive photoresist is where the unexposed areas dissolve during development.
What happens to areas based on exposure?
Consider a scenario where a photomask has several defects. What implications could this have for the resulting microstructures?
Think about the importance of precision in manufacturing.
How would you design an experiment to test the resolution limits of photolithography?
Consider what variables you could control during the process.
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