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5 cards from this section. Quick, good the night before a test.
Name one form of silicon used in MEMS fabrication.
Think about the most common type of silicon.
What is the primary role of silicon dioxide in MEMS?
Consider its insulating properties.
What is the most widely used material in MEMS fabrication?
Consider the foundational material for microelectromechanical systems.
Silicon nitride is primarily known for which of these properties?
Think about materials used for durability.
Design a MEMS device utilizing both silicon and a polymer. Describe the advantages of each material in your design.
Think about what properties each material brings to the design.
Explain how piezoelectric materials could enhance a MEMS sensor's performance when integrated with silicon.
Consider how converting mechanical stress to voltage impacts sensor capabilities.
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