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5 cards from this section. Quick, good the night before a test.
What is the primary material used in MEMS fabrication?
Think about common semiconductor materials.
What is photolithography used for?
Consider how images are transferred in different technologies.
What is the primary function of photolithography in MEMS fabrication?
Think about the image transfer process.
True or False: Silicon nitride is a good dielectric material.
Recall the properties of insulating materials.
How would you approach selecting materials for a new MEMS device intended for biomedical applications?
Think about human contact and long-term stability.
Analyze the impact of using dry etching versus wet etching on the design flexibility in MEMS.
Reflect on the trade-offs between design complexity and etching methods.
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