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2 cards from this section. Quick, good the night before a test.
List one property that affects the performance of MEMS devices.
Think about the characteristics a material must have.
What does MEMS stand for?
Consider what this term encompasses.
What is the primary focus of Chapter 8?
Think about what the main topic of the chapter deals with.
True or False: The choice of materials in MEMS fabrication does not affect its performance.
Consider the consequences of material choices.
You are tasked with designing a new MEMS device for medical applications. Discuss the materials you would select and justify your choices.
Focus on what properties are vital for medical applications.
Analyze the potential failure modes of a MEMS device resulting from flawed lithography. What impact does this have on overall device functionality?
Think about how precision in the initial stages affects the final product.
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