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4 cards from this section. Quick, good the night before a test.
What does bulk micromachining primarily create?
Think about what material is removed from the substrate.
What is the main advantage of surface micromachining?
Consider how structures are built.
What is a primary goal of bulk micromachining?
Think about what the process physically does to the substrate.
Surface micromachining builds structures layer by layer.
Recalling the method's definition might help.
Analyze the potential limitations of each fabrication technique discussed in this section and propose improvements.
Focus on current challenges and innovative solutions.
Evaluate the impact these fabrication techniques have on the overall performance of MEMS devices.
Think about how the choice of technique relates to device specifications and user needs.
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