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4 cards from this section. Quick, good the night before a test.
What is a common structural layer used in surface micromachining?
Think about materials with conductive properties.
Name a material used as a sacrificial layer.
This is a common material used in front-end lithography.
Which of the following is a common structural layer material?
It's an allotrope of silicon that is critical for electronic applications.
True or False: Silicon Nitride cannot be used as a structural material in MEMS.
Consider its advantages in flexible applications.
Design a simple MEMS device using polysilicon and silicon nitride. Discuss the choice of materials and their physical properties.
Discuss the typical forces the device will encounter.
Evaluate the impact of using photoresist versus silicon dioxide as sacrificial layers in a MEMS process.
Consider applications that may require specific material properties.
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