Practice Techniques Used (5.4.1) - Fabrication Techniques

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6 sample questions

Question 1.
What does HARMS stand for?
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Think about height vs. width.
Question 2.
Name one application of LIGA.
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It's used in biotechnology.
3Question 3.
What does HARMS stand for?
- High-Aspect-Ratio Measurement Systems
- High-Aspect-Ratio Micromachining
- High-Application Ratio Micromachining
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Consider the height-to-width relationship.
4Question 4.
True or False? LIGA process includes electroplating.
- True
- False
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Recall LIGA's components.
Question 5.
Design a MEMS-based sensor that requires high-aspect-ratio structures. Describe the materials and fabrication methods you would select.
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Consider what features are essential for the sensor's function.
Question 6.
Evaluate the economic implications of choosing DRIE for a new MEMS product prototype. What factors will you consider?
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Think about the trade-offs between investment and performance.

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