Practice Process Features (5.3.1) - Fabrication Techniques

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6 sample questions

Question 1.
What is surface micromachining?
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Focus on the construction location of microstructures.
Question 2.
Name a common structural material used in surface micromachining.
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Think about materials used for creating layers.
3Question 3.
What is the primary function of sacrificial layers in surface micromachining?
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Think about their role in the final structure.
4Question 4.
Which method is often used for layer deposition in surface micromachining?
- LPCVD
- MOCVD
- Sputtering
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Remember the specific technique frequently mentioned.
Question 5.
Design a simple microstructure ideal for surface micromachining. Discuss the choice of materials, process steps, and potential applications of your designed structure.
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Consider the features that allow it to excel in MEMS applications.
Question 6.
Evaluate the trade-offs between using dry etching versus wet etching in a hypothetical surface micromachining project.
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Think about precision vs cost in the context of project requirements.

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