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3 cards from this section. Quick, good the night before a test.
What is bulk micromachining?
Think about the materials used in MEMS.
Name a structure that can be formed using bulk micromachining.
Consider the applications for sensors.
What is the primary purpose of bulk micromachining?
Think about the actions performed in this process.
True or False: Wet etching produces vertical sidewalls.
Consider the type of etching and its results.
Propose a design for a pressure sensor using both wet and dry etching techniques. Outline the steps you would take and the materials you would choose.
Consider how each etching technique contributes to the sensor's performance.
Explain how the characteristics of anisotropic etching affect the performance of MEMS devices.
Think about the physical properties of materials shaping the performance of MEMS devices.
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