Practice Introduction (5.1) - Fabrication Techniques

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6 sample questions

Question 1.
What does MEMS stand for?
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Think about mechanical and electrical integration.
Question 2.
What is the primary substrate used in MEMS fabrication?
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It is a commonly used semiconductor material.
3Question 3.
What does MEMS stand for?
- Micro Electric Mechanical Systems
- Micro Electro Mechanical Systems
- Mechanical Electro Micro Systems
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Look for a combination of electrical and mechanical.
4Question 4.
True or False: MEMS fabrication only involves surface micromachining.
- True
- False
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Consider the different techniques discussed.
Question 5.
Design a basic MEMS device using principles from bulk micromachining. What materials would you choose, and why?
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Consider the purpose of the MEMS device.
Question 6.
Evaluate the impact of surface micromachining on the design of RF MEMS switches. What advantages do they offer?
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Think about how layering contributes to device features.

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