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5 cards from this section. Quick, good the night before a test.
What does MEMS stand for?
Think about the components involved.
Name one advantage of surface micromachining.
Consider how layers contribute to complexity.
What is the main process used in bulk micromachining?
Think about what bulk means in this context.
True or False: Surface micromachining can create movable parts.
Consider the concept of layers in this technique.
You are tasked with designing a MEMS device that involves both an actuator and a sensor. Considering the fabrication processes we've discussed, which techniques would you choose and why?
Think about the requirements of each component and their interactions.
Analyze how the wafer bonding method could impact the final performance of a MEMS device used in a medical application.
Consider the importance of integrity in medical devices.
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