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2 cards from this section. Quick, good the night before a test.
What is MEMS?
Think about what happens when micro and electronics combine.
Name one application of surface micromachining.
Think about moving parts in small devices.
What is a common application of bulk micromachining?
Think about how bulk techniques work with structural components.
Surface micromachining is primarily used for creating layered structures. True or False?
Remember the nature of how surface work differs from bulk.
Design a simple MEMS sensor system using at least three distinct fabrication techniques covered in this section.
Think about how these techniques can work together to create a functional device.
Evaluate the limitations of using soft lithography compared to traditional micromachining methods.
Consider what each method can and cannot achieve in terms of structure and application.
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